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Diversiform application of LaF3 for chemical semiconductor sensors

Title:
Diversiform application of LaF3 for chemical semiconductor sensors
Abstract:
LaF3 is an outstanding material in sensor applications. We used thin layers of the fast ion conductor on semiconductor substrates to get various chemical sensors. A fluoride ISFET is the result of the deposition of LaF3 on top of the pH-sensitive Si/SiO2/Si3N4 gate structure. The sensor properties are as good as for the well-known fluoride single-crystal electrode. The deposition of the ion conductor directly on the silicon without any insulating interlayer results in a capacitor-type sensor with a very steep C-V curve. A miniaturized reference system is realized using a multilayer structure with CaF2 and a polymer on the LaF3. The determination of the hardness of water is possible with CaF2 in a flow-through reactor. Using an enzyme-catalysed reaction liberating fluoride ions, ENFETs for glucose and lactate have been developed. Deposition of a thin Pt layer on the LaF3 results in a low-temperature oxygen sensor for measurements in gases and solutions.
Year:
1992
Publication type:
Journal article
Journal:
Sensors and Actuators B
ISSN:
0925-4005
Number:
1-3
Volume:
7
Pages:
497-500
Language:
English
Document status:
Published
PubListerURL:
https://publister.bib.th-wildau.de/publister/public/publication/2480
Moritz, W., Szeponik, J., Lisdat, F., Friebe, A., Krause, S., Hintsche, R., et al. (1992). Diversiform application of LaF3 for chemical semiconductor sensors Sensors and Actuators B. 7 (1-3), 497-500.
@article{2480,
    author           = {Moritz, Werner and Szeponik, Jan and Lisdat, Fred and Friebe, A. and Krause, Steffi and Hintsche, Rainer and Scheller, Frieder W.},
    title            = {Diversiform application of LaF3 for chemical semiconductor sensors},
    journal          = {Sensors and Actuators B},
    year             = {1992},
    volume           = {7},
    number           = {1-3},
    pages            = {497-500},
    doi              = {10.1016/0925-4005(92)80351-W},
    url              = {https://www.sciencedirect.com/science/article/pii/092540059280351W},
}


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