Hinweis (Dez. 2019): PubLister wird demnächst abgelöst. Publikationen der Technischen Hochschule Wildau werden zukünftig in HISinOne nachgewiesen. In diesem Zusammenhang kann es momentan zu Überarbeitungen und zu temporären Veränderungen Ihrer persönlichen Publikationslisten kommen. Bei weiteren Fragen wenden Sie sich bitte an friederike.borchert [at] th-wildau [dot] de.

Diversiform application of LaF3 for chemical semiconductor sensors

Title:
Diversiform application of LaF3 for chemical semiconductor sensors
Abstract:
LaF3 is an outstanding material in sensor applications. We used thin layers of the fast ion conductor on semiconductor substrates to get various chemical sensors. A fluoride ISFET is the result of the deposition of LaF3 on top of the pH-sensitive Si/SiO2/Si3N4 gate structure. The sensor properties are as good as for the well-known fluoride single-crystal electrode. The deposition of the ion conductor directly on the silicon without any insulating interlayer results in a capacitor-type sensor with a very steep C-V curve. A miniaturized reference system is realized using a multilayer structure with CaF2 and a polymer on the LaF3. The determination of the hardness of water is possible with CaF2 in a flow-through reactor. Using an enzyme-catalysed reaction liberating fluoride ions, ENFETs for glucose and lactate have been developed. Deposition of a thin Pt layer on the LaF3 results in a low-temperature oxygen sensor for measurements in gases and solutions.
Year:
1992
Publication type:
Journal article
Journal:
Sensors and Actuators B
ISSN:
0925-4005
Number:
1-3
Volume:
7
Pages:
497-500
Language:
English
Document status:
Published
PubListerURL:
https://publister.bib.th-wildau.de/publister/public/publication/2480
Moritz, W., Szeponik, J., Lisdat, F., Friebe, A., Krause, S., Hintsche, R., et al. (1992). Diversiform application of LaF3 for chemical semiconductor sensors Sensors and Actuators B. 7 (1-3), 497-500.
@article{2480,
    author           = {Moritz, Werner and Szeponik, Jan and Lisdat, Fred and Friebe, A. and Krause, Steffi and Hintsche, Rainer and Scheller, Frieder W.},
    title            = {Diversiform application of LaF3 for chemical semiconductor sensors},
    journal          = {Sensors and Actuators B},
    year             = {1992},
    volume           = {7},
    number           = {1-3},
    pages            = {497-500},
    doi              = {10.1016/0925-4005(92)80351-W},
    url              = {https://www.sciencedirect.com/science/article/pii/092540059280351W},
}


Search this title in Google Scholar